METHOD OF MANUFACTURING GRAYSCALE MASK, METHOD OF MANUFACTURING MOTHER GRAYSCALE MASK, METHOD OF MANUFACTURING MOTHER GRAYSCALE MASK WITH LENS AND MOTHER GRAYSCALE MASK
- 申请公布号：
- JP2007133428(A)
- 申请号：
- JP20070012604
- 申请日期：
- 2007.01.23
- 申请公布日期：
- 2007.05.31
- 申请人：
- HITACHI MAXELL LTD
- 发明人：
- UMEBAYASHI NOBUHIRO;KISHIGAMI KATSUHIRO
- 分类号：
- G02B5/02;G02B5/00;G02F1/1335;G02F1/13357;G03F1/56;G03F7/20
- 主分类号：
- G02B5/02
- 摘要：
- <P>PROBLEM TO BE SOLVED: To provide a microlens array and a liquid crystal display apparatus that facilitate optical axis alignment of a microlens array with excellent productivity. <P>SOLUTION: A manufacturing method of a grayscale mask having a variable density pattern corresponding to change of optical transmissivity has a step of forming a dry plate by applying a photoemulsion onto a transparent substrate and a step of irradiating the dry plate with laser beams which are subjected to a plurality of gradations of intensity modulation corresponding to the variable density pattern. <P>COPYRIGHT: (C)2007,JPO&INPIT
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