METHOD FOR COATING HOLLOW BODY, DEVICE FOR COATING HOLLOW BODY AND VESSEL HAVING AT LEAST ONE CLOSABLE OPENING

申请公布号：: JPH10330945(A)
申请号：: JP19980146204
申请日期：: 1998.05.27
申请公布日期：: 1998.12.15
申请人：: LEYBOLD SYST GMBH
发明人：: ANDERLE FRIEDRICH;HENRICH JUERGEN;DICKEN WILFRIED;GRUENWALD HEINRICH DR;LIEHR MICHAEL;NAUENBURG KLAUS DR;BECKMANN RUDOLF
分类号：: C23C16/50;B05D7/24;B65D1/00;C03C17/00;C08F2/46;C23C16/509;C23C16/511;H01J37/32;H05H1/24;(IPC1-7):C23C16/50
主分类号：: C23C16/50
摘要：: <p>PROBLEM TO BE SOLVED: To allow the wall of a vessel having an opening to only have slight permeability compared to the well known vessel by improving the vessel. SOLUTION: A hollow body 2 to be coated is loaded on the inside of an exhaustible coating chamber 10, the coating chamber is closed and next exhausted, a process gas mixture is introduced into a plasma process chamber, the gas pressure prescribed for the ignition and driving of plasma is generated entirely for the execution of coating within the retion of the limited face 6 to be coated, plasma is ignited by the irradiation of the inside of the plasma process chamber (coating chamber) with electromagnetic radiation, and plasma discharge is maintained for a prescribed time. In this way, a polymer layer checking the effluence of the gaseous and/or liq. substance to be poured into the hollow body into the outside space of the vessel is precipitated into the face 6 to be coated, the electromagnetic radiation is shielded, next, air is fed to the coating chamber, and the coated hollow body is discharged.</p>