Pressure transducer

申请公布号：

US4823230(A)

申请号：

US19880164300

申请日期：

1988.03.04

申请公布日期：

1989.04.18

申请人：

GENERAL ELECTRIC COMPANY

发明人：

TIEMANN, JEROME J.

分类号：

G01L9/00;(IPC1-7):G01L9/12;H01G7/00

主分类号：

G01L9/00

摘要：

A pressure transducer has a first electrode fabricated with a predetermined shape upon a substrate surface. A first insulator encloses that portion of the first electrode not enclosed by the substrate; a second insulator forms a wall to a predetermined height above the substrate surface, and outwardly adjacent to the entire periphery of the first electrode. The wall has a base in pressure-tight connection to the substrate and a top opposite to the base. A deflectable second electrode is fabricated in pressure-tight connection across the wall top to enclose, at a reference pressure, a cavity between the first and second electrodes and the wall; the height of the wall, the shape of the first and second electrodes and the deflection characteristics of said second electrode, with respect to pressure, are all predeterminately selected to provide a desired relationship of the capacitance between the first and second electrodes and the pressure incident upon that surface of the second electrode opposite to the cavity.