MULTIPLE FREQUENCY PLASMA ETCH REACTOR
- 申请公布号:
- EP1661171(A4)
- 申请号:
- EP20040781695
- 申请日期:
- 2004.08.20
- 申请公布日期:
- 2009.03.11
- 申请人:
- LAM RESEARCH CORPORATION
- 发明人:
- DHINDSA, RAJINDER;SADJADI, REZA, S., M.;KOZAKEVICH, FELIX;TRUSSELL, DAVE;LI, LUMIN;LENZ, ERIC;RUSU, CAMELIA;SRINIVASAN, MUKUND;EPPLER, AARON;TIETZ, JIM;MARKS, JEFFREY
- 分类号:
- H01J37/32;B23B3/10;H01L21/311;H01L21/467;H05H1/46
- 主分类号:
- H01J37/32