MICROWAVE HEATING APPARATUS

申请公布号：

US2014291318(A1)

申请号：

US201414219981

申请日期：

2014.03.19

申请公布日期：

2014.10.02

申请人：

Tokyo Electron Limited

发明人：

SHIMOMURA Kouji;KITAGAWA Junichi;YAMAMOTO Nobuhiko;HAYASHI Hiroyuki;TANAKA Sumi

分类号：

H05B6/64

主分类号：

H05B6/64

地址：

Tokyo JP

摘要：

A microwave heating apparatus is provided to perform heat treatment on a substrate to be processed by irradiating a microwave to the substrate in a processing chamber. The microwave heating apparatus includes a supporting table configured to support the substrate in the processing chamber, a microwave introducing unit configured to introduce the microwave into the processing chamber, a coolant channel formed in the supporting table, and a coolant supply source configured to supply a coolant to the coolant channel. At least a surface of the supporting table which supports the substrate is made of a material in which a product of a relative dielectric constant and a dielectric loss angle is smaller than 0.005, and the coolant supplied from the coolant supply source is liquid having no electrical polarity.

主权项：

1. A microwave heating apparatus for performing heat treatment on a substrate to be processed by irradiating a microwave to the substrate in a processing chamber, comprising: a supporting table configured to support the substrate in the processing chamber; a microwave introducing unit configured to introduce the microwave into the processing chamber; a coolant channel formed in the supporting table; and a coolant supply source configured to supply a coolant to the coolant channel, wherein at least a surface of the supporting table which supports the substrate is made of a material in which a product of a relative dielectric constant and a dielectric loss angle is smaller than 0.005; and wherein the coolant supplied from the coolant supply source is liquid having no electrical polarity.