VORRICHTUNG ZUR VEREDELUNG EINES HALBLEITERMATERIALS
- 申请公布号:
- DE2833615(A1)
- 申请号:
- DE19782833615
- 申请日期:
- 1978.07.31
- 申请公布日期:
- 1979.03.08
- 申请人:
- TOPSIL A/S
- 发明人:
- DE LEON,NOEL;MARC LARSEN,ARNO IVAN;E. KNUDSEN,POUL;HELANDER JENSEN,ERIK
- 分类号:
- C30B13/00;C30B13/28;C30B13/32;(IPC1-7):B01J17/10
- 主分类号:
- C30B13/00
- 摘要:
- Apparatus for the float zone refining of large semiconductor crystals. Additional support in the form of lightweight pins is provided for the growing monocrystalline rod to hold the rod on the proper vertical axis. The pins protrude from the telescoping inner wall portion of the refining enclosure. This telescoping enclosure portion allows the pins to be in synchronous motion with the monocrystalline rod and also reduces the overall height of the apparatus.
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