SPECIMENNEXCHANGING DEVICE IN ELECTRONIC BEAM DEPICTING DEVICE

申请公布号：: JPS55146932(A)
申请号：: JP19790054219
申请日期：: 1979.05.04
申请公布日期：: 1980.11.15
申请人：: HITACHI LTD
发明人：: UNNO YOSHIMASA;KATAGIRI SHINJIROU;KATSUTA TEIJI
分类号：: H01L21/027;H01J37/34;(IPC1-7):01L21/30
主分类号：: H01L21/027
摘要：: PURPOSE:To achieve improvement of operating efficiency, by equipping an electronic image depicting device with a takeout chamber so that any imaging-completed specimen can be cured in a vacuum container and freely taken out to outside of vacuum chamber while keeping its vacuum as it is. CONSTITUTION:Specimen is kept in a cassette 9, the cassette is put into a magazine 8 and placed on a table 5, and it's top is closed for evacuation. By opening a valve 6 and making adjustment of position of the table 5, the cassette is shifted from a vacuum container 4 over to a transfer table 2 in chamber 1 and a valve 7 is closed to enable imaging to be executed. After the execution of imaging, the valve 7 is opened and the cassette is pulled back toward the magazine 8, and the next cassette is processed. After evacuation of a takeout chamber 12, a valve 18 is opened, the table 5's position is adjusted, the cassette is pulled out by a rod 16 and led onto a receiving unit of cassette feeding units 14a and 14b in the takeout chamber. By turning of a knob 15, the cassette 9 is moved upwardly, and by repetition of pullout, turning and push-up actions, the cassettes are collected by a receiving box 13 in turn. It is possible in this manner to efficiency take out processing-completed cassettes keeping pace up with imaging and curing processes.