INSPECTING SYSTEM FOR WAFER

申请公布号：

JPS56114348(A)

申请号：

JP19800017502

申请日期：

1980.02.14

申请公布日期：

1981.09.08

申请人：

TERUMETSUKU KK

发明人：

INOUE JIYUNICHI

分类号：

H01L21/66;G01R31/302

主分类号：

H01L21/66

摘要：

PURPOSE:To inspect a wafer accurately by a system wherein a probe of a probe card is connected to a tester at a remote location through optical fibers, and the output of the probe is converted into electrical signals, when inspecting an element with light receiving and luminous elements for input and output. CONSTITUTION:A head 2 including a driver and a comparator of a tester is not moved, and signals are given and received by optical fibers 5 from a probing machine 3 and converted 4 by photoelectrical transducer. According to such constitution, a wafer can be inspected efficiently.