PROBING METHOD

申请公布号：

JPS61168932(A)

申请号：

JP19850009022

申请日期：

1985.01.23

申请公布日期：

1986.07.30

申请人：

HITACHI LTD

发明人：

SAITO TAKESHI

分类号：

H01L21/66

主分类号：

H01L21/66

摘要：

PURPOSE:To secure the field of view of a microscope without shielding of light due to many probes, by contacting the tips of the probes corresponding to pads to at least three pads, which are located at the outside of the other pad group, performing probe alignment, and carrying out the total probing. CONSTITUTION:In probing work, four probes 14 for probe alignment, which are protruded into front and rear voids 13 in a window hole 11 in a probe card 9, are contacted with bumps 8 of pads 7 for probe alignment, which are arranged in front and rear voids 6 in a pellet 2. The probing work is observed by the microscope through the window hole 11, and the probe card and a wafer 1 are relatively moved. Thus the contacting work of the probes 14 and the bumps 8 of the pads 7 for the probe alignment can be carried out without obstruction to the field of view due to the group of other probes 12.