OPTICAL SWITCH

申请公布号：

JPS6437539(A)

申请号：

JP19870192706

申请日期：

1987.08.03

申请公布日期：

1989.02.08

申请人：

NIPPON TELEGR & TELEPH CORP <NTT>

发明人：

ITO FUMIHIKO;TANIFUJI TADATOSHI

分类号：

G02B6/12;G02F1/31;G02F1/313

主分类号：

G02B6/12

摘要：

PURPOSE:To obtain an optical switch which is excellent in crosstalk characteristic by laminating a 2nd clad layer on a 1st clad layer and implanting from the 2nd clad layer to a part of the 1st clad layer including an optical waveguide with proton. CONSTITUTION:The 1st clad layer 7 is laminated on a substrate 3 and the 2nd clad layer 5 is laminated on the 1st clad layer 7. A core layer 6 constituting optical waveguides 2A and 2B is buried in the 2nd clad layer 5 and at least one surface of the core 6 is in contact with the 1st clad layer 7. And H<+> (proton) is implanted into both sides of a current applied area deeper than the depth of the core 6, leaving the current applied part of the optical switch. The best advantage in proton thrust structure like this is that the diffusion in the core 6 of an injection carrier in a horizontal direction can be suppressed and a sharper total reflecting surface can be formed since the diffusion length of the implanted carrier becomes drastically small in an H<+> implanted area 4. Thus, the miniaturized optical switch in which crosstalk is small and whose acting speed is fast can be obtained.