Semiconductor pressure transducer

申请公布号：

US4843454(A)

申请号：

US19860934847

申请日期：

1986.11.25

申请公布日期：

1989.06.27

申请人：

NIPPONDENSO CO., LTD.

发明人：

KATO, YUKIHIRO;OKADA, HIROSHI;WATANABE, YOSHIFUMI;INA, OSAMU;ITO, OSAMU;YOKOMORI, IWAO

分类号：

G01L9/00

主分类号：

G01L9/00

摘要：

A semiconductor pressure transducer comprises a metal housing having a cylindrical recess to which an inlet passage of a medium to be measured is opened, a glass base being received in the recess and having a large diameter cylindrical portion and a small diameter cylindrical portion integrally connected to the large diameter cylindrical portion, a rubber O-ring interposed between a bottom of the recess and the base, a metal tubular collar disposed in the recess around the base to come into contact with the bottom of the recess, the collar urged by a caulked portion of the housing to press the base, a sensor chip provided on an end of the small diameter cylinder of the base for generating an electric signal in response to pressure of said medium, an annular clearance provided between the collar and the base, and an introducing passage provided in the base for introducing the medium from the inlet passage to the sensor chip.