Phase detection deflectometer-type optical device having a large measuring range

申请公布号：: US5440383(A)
申请号：: US19930150127
申请日期：: 1993.11.30
申请公布日期：: 1995.08.08
申请人：: ESSILOR INTERNATIONAL (COMPAGNIE GENERAL D'OPTIQUE)
发明人：: BACCHUS, JEAN M.;DURAND, ERIC
分类号：: G01J9/00;G01B11/255;G01M11/00;G01M11/02;G02B13/00;G02B27/44;(IPC1-7):G01B9/00
主分类号：: G01J9/00
摘要：: PCT No. PCT/FR93/00323 Sec. 371 Date Nov. 30, 1993 Sec. 102(e) Date Nov. 30, 1993 PCT Filed Mar. 31, 1993 PCT Pub. No. WO93/20416 PCT Pub. Date Oct. 14, 1993.An optical device, of the deflectometer type, particularly with phase detection, comprises a light source, a surface to be tested, a semi-reflective surface between the light source and the surface to be tested to deflect the light beam reflected by the surface to be tested, a grating placed adjacent a focal region of the reflected light beam, and a CCD camera coupled to a data processor. Between the grating and the CCD camera there is a primary objective (19) with a large entry pupil supplying an intermediate image, a ground glass (20) adapted to receive this intermediate image, and a secondary optical system (21) through which the intermediate image passes which is formed on the ground glass (20) and which forms a final image on the a detector (6) of the CCD camera.