CAPACITY TYPE ELECTROSTATIC SERVO ACCELERATION SENSOR
- 申请公布号：
- JPH08178955(A)
- 申请号：
- JP19940320860
- 申请日期：
- 1994.12.22
- 申请公布日期：
- 1996.07.12
- 申请人：
- MURATA MFG CO LTD
- 发明人：
- SHIBANO TOMIO
- 分类号：
- G01P15/125;G01P15/13;G01R27/26
- 主分类号：
- G01P15/125
- 摘要：
- PURPOSE: To provide a capacity type electrostatic servo acceleration sensor that unnecessitates a highly accurate oscillator and can detect acceleration with high sensitivity and reduce an error. CONSTITUTION: A PAM circuit 7 is adopted to perform a pulse amplitude modulation proportional to an acceleration G, and the product of the open gain and voltage feedback rate of an operational amplifier A3 constituting a comparator 5 is sufficiently made larger than one. The measurement mode period and dynamic balance mode period are repeated alternately. In the measurement mode period, a switch ϕ9 is turned on, a switch ϕ10 is turned off, a movable electrode 11 is not restricted by servo, a switch ϕ11 is turned off, a switch ϕ8 is turned on, and a detection voltage Vsc corresponding to the acceleration G is subject to sample-holding. In the dynamic balance mode period, a switch ϕ9 is turned off, a switch ϕ10 is turned on, a switch ϕ11 is turned on while the electrode 11 is restricted by servo based on the detection voltage Vsc obtained by sample holding, and the electrode 11 is shortcircuited to circuit ground potential.
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