SINGLE CRYSTAL PULLING-UP DEVICE

申请公布号：

JPH09183684(A)

申请号：

JP19950351277

申请日期：

1995.12.27

申请公布日期：

1997.07.15

申请人：

SHIN ETSU HANDOTAI CO LTD

发明人：

OZAKI ATSUSHI;URANO MASAHIKO;HARADA ISAMU;KAKEGAWA TOMOHIRO;NAKANO HIDEKI

分类号：

C30B15/00;C30B15/14;(IPC1-7):C30B15/00

主分类号：

C30B15/00

摘要：

PROBLEM TO BE SOLVED: To prevent a raw material melt from solidifying even when the heating of the raw material melt in a crucible of a single crystal pulling-up device of a Czochralski method is impossible. SOLUTION: The heating state is maintained by a back up controller 21 of a back up system B to maintain the melting state of the raw material melt 15 of the single crystal pulling-up, machine 1 by changing over the relays of a signal change over circuit 24 at the time when the heating state is no more maintainable by a certain reason when the pulling-up machine is operated while the heating control of the heater for heating the raw material melt is executed by a main controller 16 of a main system M.