FLUORESCENT X-RAY ANALYSIS DEVICE

申请公布号：

JP2000214106(A)

申请号：

JP19990017959

申请日期：

1999.01.27

申请公布日期：

2000.08.04

申请人：

RIGAKU INDUSTRIAL CO

发明人：

ONIZUKA YOSHINOBU;OGURA KEISUKE

分类号：

G01N23/223;(IPC1-7):G01N23/223

主分类号：

G01N23/223

摘要：

PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analysis device for accurately analyzing X rays even if a PR gas is leaked from a gas flow proportional counter to an analysis chamber. SOLUTION: A fluorescent X-ray analysis device for applying X rays B1 to a sample 4 in an analysis chamber 2 and detecting and analyzing fluorescent X rays B2 generated from the sample 4 with a detector 7 is provided with a gas flow proportional counter as the detector 7, a throttle valve 9 that is provided at an introduction passage 8 for introducing air or nitrogen gas into the analysis chamber 2 and feeding a fixed amount of air or nitrogen gas during evacuation, a pressure sensor 10 for detecting the pressure in the analysis chamber 2, a vacuum pump 11 for exhausting air in the analysis chamber 2, and a pressure control means 14 for adjusting the amount of exhaust of the vacuum pump 11 so that a pressure detection value according to the pressure sensor 10 coincides with a specific vacuum pressure setting value.