METHOD FOR PRODUCING PLANER MICROLENS AND PLANAR MICROLENS PRODUCED BY THE METHOD
- 申请公布号：
- JP2001201609(A)
- 申请号：
- JP20000010678
- 申请日期：
- 2000.01.19
- 申请公布日期：
- 2001.07.27
- 申请人：
- NIPPON SHEET GLASS CO LTD
- 发明人：
- HAMANAKA KENJIRO;SASAKI KIYOTAKA;TAGAMI TAKASHI
- 分类号：
- G02F1/1335;B29D11/00;C03B11/08;C03C15/00;G02B3/00
- 主分类号：
- G02F1/1335
- 摘要：
- PROBLEM TO BE SOLVED: To provide a high precision planar microlense having a sufficient thickness of the lens part. SOLUTION: A glass substrate for a stamper is coated with a mask and wet-etched as shown in (a). The glass substrate is etched and the resulting recesses are made close to each other by further two-stage etching to obtain a stamper as shown in (b). An uncured resin is heaped on the shaping surface of the stamper and a glass substrate for MLA is pressed on the uncured resin to shape the uncured as shown in (d). The uncured resin is cured and the stamper is released as shown in (e). RIE is carried out to remove the resin layer as shown in (f) and a planer glass microlens array shown by (g) is obtained.
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