Process for producing optical article

申请公布号：

US6726814(B2)

申请号：

US20020056092

申请日期：

2002.01.28

申请公布日期：

2004.04.27

申请人：

OHMI TADAHIRO;HARADA KAZUYUKI;TANAKA NOBUYOSHI

发明人：

OHMI TADAHIRO;HARADA KAZUYUKI;TANAKA NOBUYOSHI

分类号：

G02B5/28;C23C14/06;C23C14/08;C23C14/10;G02B1/11;G03F7/20;G03F9/00;H01L21/027;H01S3/101;(IPC1-7):C23C14/34;B05D5/06;B05D1/36;B05D7/00

主分类号：

G02B5/28

摘要：

A process for producing an optical article includes laminating a first optically transparent thin layer and a second optically transparent thin layer having a higher refractive index than that of the first optically transparent thin layer on a surface of a substrate. At least one of the first and second optically transparent thin layers is deposited by sputtering using a sputtering gas comprising atoms of at least one selected from the group consisting of krypton, xenon and radon.