Thermal bubble membrane microfluidic actuator

申请公布号：

US2005052502(A1)

申请号：

US20030656755

申请日期：

2003.09.06

申请公布日期：

2005.03.10

申请人：

INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE.,

发明人：

CHUNG CHEN-KUEI;CHUANG SWAY;CHEN CHUNG-CHU

分类号：

B41J2/14;B41J2/16;(IPC1-7):B41J2/05

主分类号：

B41J2/14

摘要：

A thermal bubble membrane actuator for ejecting a liquid which includes a base substrate, a first plurality of heating elements, a first plurality of electrodes, a first plurality of expansion chambers, and elastic membrane sealing the chambers, a liquid flow channel formed in a second thick film photoresist layer, and a top substrate sealing the liquid flow channel having a liquid inlet and a liquid outlet formed therein.