METHOD FOR PRODUCING A UNIT COMPRISING THREE-DIMENSIONAL SURFACE STRUCTURING AND USE OF SAID METHOD
- 申请公布号:
- EP1502156(B1)
- 申请号:
- EP20030749830
- 申请日期:
- 2003.05.07
- 申请公布日期:
- 2005.11.16
- 申请人:
- UNAXIS BALZERS AKTIENGESELLSCHAFT
- 发明人:
- GRABHER, PATRICK;HEINE-KEMPKENS, CLAUS;BISCHOFBERGER, ROGER
- 分类号:
- H01L21/027;G03F7/00;G03F7/40;G03F7/42;(IPC1-7):G03F7/00;G02B7/00
- 主分类号:
- H01L21/027