MANUFACTURING DEVICE AND MANUFACTURING METHOD OF LIGHT-EMITTING DEVICE

申请公布号：: JP2009009935(A)
申请号：: JP20080137564
申请日期：: 2008.05.27
申请公布日期：: 2009.01.15
申请人：: SEMICONDUCTOR ENERGY LAB CO LTD
发明人：: HIRAKATA YOSHIHARU;IKEDA TOSHIO;IBE TAKAHIRO;YAMAZAKI SHUNPEI
分类号：: H05B33/10;H01L51/50
主分类号：: H05B33/10
摘要：: <P>PROBLEM TO BE SOLVED: To solve the problem that requirements such as higher definition, a higher opening aperture, and higher reliability on a full-color flat panel display have been increased and such requirements become big problems in advancing the higher definition (increase in the number of pixels) of a light-emitting device and the miniaturization of each display pixel pitch accompanied by a reduction in the size of the light-emitting device. <P>SOLUTION: The deposition of a layer containing an organic compound is selectively performed by making a laser beam pass through openings of a mask. An irradiated substrate provided with a light absorption layer and a material layer including an organic compound and a deposited substrate provided with first electrodes are arranged so as to face each other. The light absorption layer is heated by a laser beam which has passed through the openings of the mask, and the organic compound at a position overlapped with the heated region is vaporized, and accordingly, the organic compound is selectively deposited on the deposited substrate. <P>COPYRIGHT: (C)2009,JPO&INPIT