METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR, AND ELECTRONIC COMPONENT

申请公布号：: JP2010118784(A)
申请号：: JP20080289098
申请日期：: 2008.11.11
申请公布日期：: 2010.05.27
申请人：: NIPPON DEMPA KOGYO CO LTD
发明人：: TAKAHASHI TAKEHIRO
分类号：: H03H3/04;H01L41/09;H01L41/18;H01L41/22;H01L41/23;H01L41/253;H03H9/02;H03H9/10
主分类号：: H03H3/04
摘要：: <P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator capable of preventing occurrence of a defect due to scattering and adhering of shavings of an adjustment film to an excitation electrode, in a piezoelectric vibrator with a tuning fork type element for a piezoelectric vibrator arranged in a housing. <P>SOLUTION: In this method of manufacturing a crystal vibrator composed by mounting an element 10 for crystal vibrator including a tuning fork type crystal piece 11, excitation electrodes 6a, 6b, 6c, and an adjustment film 8 for frequency adjustment in a housing 20, a wall face 29 for preventing shavings of the adjustment film 8 from scattering is formed between an atmosphere with the excitation electrodes 6a, 6b, 6c in the housing 20 located therein and an atmosphere with the adjustment film 8 located therein, and the shavings having scattered are prevented from adhering to and being short-circuited to the excitation electrodes 6a, 6b, 6c by the wall face 29 when the adjustment film 8 is shaven off by laser light for adjusting the frequency of the element 10 for crystal vibrator, and thereby the occurrence of a defect is prevented. <P>COPYRIGHT: (C)2010,JPO&INPIT