ADAMANTANE DERIVATIVE, METHOD FOR PRODUCING SAME, POLYMER USING SAME AS STARTING MATERIAL, AND RESIN COMPOSITION

申请公布号：: WO2010101010(A1)
申请号：: WO2010JP51971
申请日期：: 2010.02.10
申请公布日期：: 2010.09.10
申请人：: MITSUBISHI GAS CHEMICAL COMPANY, INC.;ARAI, YOSHIHISA;ISOBE, TAKEHIKO
发明人：: ARAI, YOSHIHISA;ISOBE, TAKEHIKO
分类号：: C07C69/757;C07C67/08;C08F20/28;G03F7/039
主分类号：: C07C69/757
摘要：: <p>Provided are an adamantane derivative represented by formula (1), a method for producing the same, a polymer containing an acrylate compound having an adamantane structure represented by formula (1) as a repeating unit, and a functional resin composition which contains the polymer, has excellent alkali developability and substrate adhesiveness, and can improve resolution and line edge roughness without deteriorating basic physical properties as a resist such as pattern forming properties, dry etching resistance, and heat resistance when used as a chemically amplified resist sensitive to far-ultraviolet rays represented by a KrF excimer laser, an ArF excimer laser, an F2 excimer laser, or an EUV. In formula (1), R1 to R3 are the same or different and represent a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, or an alkyl halide group; R4 to R8 are the same or different and represent an alkyl group having 1 to 3 carbon atoms or an alkyl halide group; X's are the same or different and represent a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, or an alkoxy group having 1 to 3 carbon atoms; and n represents 14.</p>