PIEZOELECTRIC DEVICE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC SUBSTRATE

申请公布号：: JP2012090081(A)
申请号：: JP20100235157
申请日期：: 2010.10.20
申请公布日期：: 2012.05.10
申请人：: NIPPON DEMPA KOGYO CO LTD
发明人：: TAKAHASHI TAKEHIRO
分类号：: H03H9/02;H01L23/08;H03H3/02;H03H9/10
主分类号：: H03H9/02
摘要：: <P>PROBLEM TO BE SOLVED: To provide a piezoelectric device that has a lead electrode formed on a side surface of a support portion. <P>SOLUTION: A piezoelectric device (100) includes: a piezoelectric substrate (30) having a quadrangular vibrating reed (31) with a pair of excitation electrodes (35a, 35b) formed on a first principal surface (38a) and a second principal surface (38b), a frame portion (32) surrounding the vibrating reed, a support portion (33) supportively connecting the vibrating reed to the frame portion in a constant width through groove (34) formed between the vibrating reed and the frame portion, and a pair of lead electrodes (36a, 36b) formed from the pair of excitation electrodes to the frame portion via the support portion; a lid part (10) joined to the first principal surface of the frame portion; and a base part (20) including a bottom surface (25a) joined to the second principal surface of the frame portion and a mounting surface (25b) opposite to the bottom surface. The lead electrode formed on the first principal surface is extended to the second principal surface via a side surface of the constant width through groove in a region which does not overlap with the excitation electrodes of the vibrating reed. <P>COPYRIGHT: (C)2012,JPO&INPIT