CAPACITANCE TYPE ACCELERATION SENSOR

申请公布号：

JP2012088083(A)

申请号：

JP20100232910

申请日期：

2010.10.15

申请公布日期：

2012.05.10

申请人：

ROHM CO LTD

发明人：

NAKAYA GORO

分类号：

G01P15/125;B81B3/00;G01P15/18;H01L29/84

主分类号：

G01P15/125

摘要：

<P>PROBLEM TO BE SOLVED: To provide a capacitance type acceleration sensor having a simple structure and an excellent detection sensitivity. <P>SOLUTION: Stationary Z electrodes 61 and movable Z electrodes 62 meshing at a mutual interval are formed on a surface part (an upper wall 11) of a semi-conductor substrate 2 having an inside cavity 10. Next, a dielectric layer 70 is embedded in an electrode part 66 of each movable Z electrode 62 from the surface of the semi-conductor substrate 2 to a midway part in the thickness direction of the cavity 10. Thus, by adding a capacitance based on an inter-electrode distance d1 and a capacitance based on an inter-electrode distance d2 to a capacitor constituted by electrode parts 64 of the stationary Z electrodes 61 and the electrode parts 66 of the movable Z electrodes 62 facing each other, a difference in capacitance can be provided in the same capacitor. <P>COPYRIGHT: (C)2012,JPO&INPIT