SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD, AND STORAGE MEDIUM
- 申请公布号：
- JP2012099656(A)
- 申请号：
- JP20100246486
- 申请日期：
- 2010.11.02
- 申请公布日期：
- 2012.05.24
- 申请人：
- TOKYO ELECTRON LTD
- 发明人：
- DEGUCHI MASATOSHI;ITO KAZUHIKO
- 分类号：
- H01L21/677;H01L21/027
- 主分类号：
- H01L21/677
- 摘要：
- <P>PROBLEM TO BE SOLVED: To provide a technology capable of promptly carrying a substrate without routing a vacuum pipeline on the outside of a holding member, when the substrate is vacuum-sucked by the holding member to be carried. <P>SOLUTION: Vacuum pumps 42a and 42b, and batteries 41a and 41b are respectively mounted on a first arm 2a and a second arm 2b which are holding members. The batteries 41a and 41b are charged from a carrying base 1 through power transmission coils 14a and 14b and power reception coils 44a and 44b by electromagnetic induction method in a non-contacting manner. Therefore, electronic components mounted on the arms 2a and 2b such as the vacuum pumps 42a and 42b, solenoid valves 43a and 43b, and pressure detecting portions 45a and 45b are actuated by power from the batteries 41a and 41b, without piping and electric wiring from the outside in the arms 2a and 2b. <P>COPYRIGHT: (C)2012,JPO&INPIT
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