DROP RECIPE PREPARATION METHOD AND DATABASE GENERATING METHOD
- 申请公布号：
- JP2012114157(A)
- 申请号：
- JP20100260293
- 申请日期：
- 2010.11.22
- 申请公布日期：
- 2012.06.14
- 申请人：
- TOSHIBA CORP
- 发明人：
- MATSUOKA YASUO;INENAMI RYOICHI;OTA TAKUMI
- 分类号：
- H01L21/027
- 主分类号：
- H01L21/027
- 摘要：
- <P>PROBLEM TO BE SOLVED: To easily prepare a drop recipe. <P>SOLUTION: This method includes a test drop recipe preparation step for preparing a plurality of testing drop recipes based on design data of a semiconductor integrated circuit, a selection step for selecting the drop recipe with a smallest number of defects for every imprinting position on a processed substrate from the plural testing drop recipes based on results of defect tests of patterns of a hardening resin material formed by imprinting a template, on which a pattern of the semiconductor integrated circuit is formed, on the hardening resin material applied to a processed substrate using the testing drop recipe, and a database step for creating a drop recipe preparation assist database by collecting the drop recipe for every selected imprinting position in every functional circuit block constituting the semiconductor integrated circuit. <P>COPYRIGHT: (C)2012,JPO&INPIT
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