MAGNETIC FIELD CONTROLLER AND DEFLECTION ELECTROMAGNET DEVICE
- 申请公布号：
- JP2012119101(A)
- 申请号：
- JP20100265899
- 申请日期：
- 2010.11.30
- 申请公布日期：
- 2012.06.21
- 申请人：
- HITACHI LTD
- 发明人：
- YAMADA TAKAHIRO;NODA FUMIAKI
- 分类号：
- H05H13/04;H05H7/04;H05H7/14
- 主分类号：
- H05H13/04
- 摘要：
- <P>PROBLEM TO BE SOLVED: To provide an eddy current magnetic field correction device in which the width of a correction plate can be reduced. <P>SOLUTION: The eddy current magnetic field correction device is configured of a conductive vacuum duct 1 installed between deflection electromagnet poles 3, and a conductive correction plate 2. The correction plate 2 is made of a material having a conductivity higher than that of the vacuum duct 1. When the cross section of the vacuum duct 1 perpendicular to the traveling direction of a charged particle beam is divided into four regions by a symmetry plane where both poles of the deflection electromagnet become mirror images, and a plane perpendicular to the symmetry plane and through which the center of gravity of the charged particle beam passes, a plurality of conductive correction plates 2 are installed in each region. <P>COPYRIGHT: (C)2012,JPO&INPIT
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