Electromagnetic radiation detector and method of manufacturing such a detector
- 申请公布号：
- EP2019301(B1)
- 申请号：
- EP20080305392
- 申请日期：
- 2008.07.10
- 申请公布日期：
- 2013.05.01
- 申请人：
- ULIS
- 发明人：
- VILAIN, MICHEL
- 分类号：
- G01J5/20;B81B3/00;H01L27/146
- 主分类号：
- G01J5/20
- 摘要：
- <p>The detector has a structural substrate and a detection element comprising a membrane (16) sensitive to electromagnetic radiation and suspended above the substrate. A distance between the membrane and the substrate is variable, and has a predefined spatial distribution for minimizing rapid variations of a response of the detector to the radiation in a predefined wavelength range. The membrane comprises a bolometric material e.g. metal oxide, sensitive to a temperature variation resulting from exposure to infrared radiation. An independent claim is also included for a method for manufacturing an electromagnetic radiation detector.</p>
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