PARTICLE DETECTION DEVICE AND PARTICLE DETECTION METHOD
- 申请公布号：
- WO2014097724(A1)
- 申请号：
- WO2013JP77883
- 申请日期：
- 2013.10.15
- 申请公布日期：
- 2014.06.26
- 申请人：
- SONY CORPORATION
- 发明人：
- TAHARA KATSUTOSHI
- 分类号：
- G01N15/14;G01N21/49
- 主分类号：
- G01N15/14
- 摘要：
- Provided are a particle detection device and a particle detection method whereby it is possible to accurately detect scattered light. This particle detection device has at least a light irradiation unit for irradiating particles with light, and a scattered light detection unit for detecting scattered light emitted from the irradiated particles. The scattered light detection unit is equipped with first detection unit for detecting scattered light, a second detection unit for detecting light irradiating the particles, and a signal processing unit for eliminating noise components from the signal detected by the first detection unit, doing so on the basis of a signal detected by the second detection unit.
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