SEGMENTED SUBSTRATE LOADING FOR MULTIPLE SUBSTRATE PROCESSING
- 申请公布号：
- US2015063957(A1)
- 申请号：
- US201414535795
- 申请日期：
- 2014.11.07
- 申请公布日期：
- 2015.03.05
- 申请人：
- Applied Materials, Inc.
- 发明人：
- OLGADO Donald
- 分类号：
- H01L21/677;H01L21/687;H01L21/68;H01L21/67
- 主分类号：
- H01L21/677
- 地址：
- Santa Clara CA US
- 摘要：
- Embodiments of the present disclosure provide apparatus and methods for loading and unloading a multiple-substrate processing chamber segment by segment. One embodiment of the present disclosure provides an apparatus for processing multiple substrates. The apparatus includes a substrate supporting tray having a plurality of substrate pockets forming a plurality of segments, and a substrate handling assembly configured to pick up and drop off substrates from and to a segment of substrate pockets of the substrate supporting tray.
- 主权项：
- 1. An apparatus for processing multiple substrates, comprising:
a chamber body defining a processing volume, wherein the chamber body has an opening to allow passage of substrates therethrough; a substrate support assembly disposed in the processing volume and rotatable about a central axis, wherein the substrate support assembly has two or more segments of substrate pockets formed on an upper surface, and each substrate pocket accommodates a substrate therein; and a substrate handling assembly disposed in the processing volume, wherein the substrate handling assembly is capable of loading and unloading one segment of substrate pockets at a time, and the substrate support assembly rotates about the central axis to align each segment of substrate pockets with the substrate handling assembly.
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