HARD FILM EXCELLENT IN LUBRICITY AND ABRASION RESISTANCE, AND MANUFACTURING METHOD THEREOF
- 申请公布号：
- JP2015054995(A)
- 申请号：
- JP20130189626
- 申请日期：
- 2013.09.12
- 申请公布日期：
- 2015.03.23
- 申请人：
- KOBE STEEL LTD
- 发明人：
- YAMAMOTO KENJI
- 分类号：
- C23C14/06;B23B27/14;C23C14/32
- 主分类号：
- C23C14/06
- 摘要：
- PROBLEM TO BE SOLVED: To provide a hard film excellent in lubricity and abrasion resistance that has a low friction coefficient and hardly seizes up under a slide environment.SOLUTION: A hard film has a composition formula: MCN, (wherein M is composed of one or more elements selected from the group consisting of Ti, Cr, and Al, or one or more elements selected from the group consisting of the above elements, a group IV element, a group V element, a group VI element, Si, Y, and rare-earth element). The film satisfies the expressions: 0.01≤a≤0.50, 0.10≤b≤0.50, and 0<1-a-b on an atom ratio of each element. The film has a carbon-carbon bond ratio (Y) of 0.2 or higher relative to a whole bond ratio of carbon in the film.
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