雪崩光电二极管的制造方法
- 申请公布号:
- CN105655436A
- 申请号:
- CN201510848856.9
- 申请日期:
- 2015.11.27
- 申请公布日期:
- 2016.06.08
- 申请人:
- 三菱电机株式会社
- 发明人:
- 山口晴央;畠中奖
- 分类号:
- H01L31/107(2006.01)I;H01L31/18(2006.01)I
- 主分类号:
- H01L31/107(2006.01)I
- 代理机构:
- 北京天昊联合知识产权代理有限公司 11112
- 代理人:
- 何立波;张天舒
- 地址:
- 日本东京
- 摘要:
- 本发明得到一种雪崩光电二极管的制造方法,其能够改善p型电场缓和层中所添加的碳的活化率。在衬底(1)上形成p型电场缓和层(5),在p型电场缓和层(5)中作为p型掺杂物而添加碳,作为组成而包含铝。在p型电场缓和层(5)上形成帽盖层(6)。在帽盖层(6)上形成光吸收层(7)。不导入V族原料而在不活泼气体气氛中进行从帽盖层(6)的生长温度至光吸收层(7)的生长温度为止的升温工序。
- 主权项:
- 一种雪崩光电二极管的制造方法,其特征在于,具有以下工序:在衬底上形成p型电场缓和层的工序,其中,在该p型电场缓和层中作为p型掺杂物而添加碳,作为组成而包含铝;在所述p型电场缓和层上形成帽盖层的工序;以及在所述帽盖层上形成光吸收层的工序,不导入V族原料而在不活泼气体气氛中进行从所述帽盖层的生长温度至所述光吸收层的生长温度为止的升温工序。
专利推荐
- REMOVAL OF VAPOR GAS GENERATED BY AN OIL-CONTAINING MATERIAL
- PHASE SHIFTED TRANSMITTED SIGNALS IN A SIMULTANEOUS DUAL POLARIZATION WEATHER SYSTEM
- POLYMER FILM, POLARIZING PLATE PROTECTIVE FILM, POLARIZING PLATE AND LIQUID CRYSTAL DISPLAY DEVICE
- PHOTOSENSITIVE COMPOSITION, PHOTOSENSITIVE FILM, METHOD OF FORMING PERMANENT PATTERN, AND PRINTED WIRING BOARD
- TRANSVERSE STRETCHING DEVICE
- A HAND-WEARING INPUT DEVICE
- RFID ITEM LEVEL LABEL CONSTRUCTION WITHOUT NEED FOR CHIP OR STRAP ATTACHMENT
- A NEW TYPE OF HAT
- ANODE FOR LIQUID FUEL CELL, MEMBRANE ELECTRODE ASSEMBLY FOR LIQUID FUEL CELL, AND LIQUID FUEL CELL
- WORLDWIDE WEB BASED DELIVERY OF SPORTS AND ACADEMIC DIGITAL CONTENT
- BICYCLE WHEEL SPINNER ASSEMBLY
- REAL ESTATE DERIVATIVE FINANCIAL PRODUCTS, INDEX DESIGN, TRADING METHODS, AND SUPPORTING COMPUTER SYSTEMS
- SPLIT GATE MEMORY CELL IN A FINFET
- POLYMER CONJUGATE OF TAXANE
- METHODS AND SYSTEMS FOR MODELING GENE NETWORKS
- METHOD OF PRODUCING CHITOSAN SCAFFOLD HAVING HIGH TENSILE STRENGTH AND CHITOSAN SCAFFOLD PRODUCED USING THE METHOD
- PROCESS FOR PRODUCING GAS HYDRATE AND APPARATUS THEREFOR
- DEVICE, METHOD AND SYSTEM OF DATA SECURITY PROCESSING
- CARBON-COATED COMPOSITE MATERIAL, MANUFACTURING METHOD THEREOF, POSITIVE ACTIVE MATERIAL, AND LITHIUM SECONDARY BATTERY COMPRISING THE SAME
- FUEL CELLS EVAPORATIVELY REACTANT GAS COOLING AND OPERATIONAL FREEZE PREVENTION
Copyright Notice © 2009-2024 传众 版权所有