Magnetic inertial sensor and method for operating the same
- 申请公布号：
- US9618532(B2)
- 申请号：
- US201615081507
- 申请日期：
- 2016.03.25
- 申请公布日期：
- 2017.04.11
- 申请人：
- STMICROELECTRONICS S.R.L.
- 发明人：
- Ricotti Giulio;Pagani Alberto;Fontana Fulvio Vittorio;Mastromatteo Ubaldo
- 分类号：
- G01P15/11;G01P15/105;G01P15/08;B81B7/00;B81C1/00;G01C19/5783;G01P15/097
- 主分类号：
- G01P15/11
- 代理机构：
- Seed Intellectual Property Law Group LLP
- 代理人：
- Seed Intellectual Property Law Group LLP
- 地址：
- Agrate Brianza IT
- 摘要：
- An inertial sensor having a body with an excitation coil and a first sensing coil extending along a first axis. A suspended mass includes a magnetic-field concentrator, in a position corresponding to the excitation coil, and configured for displacing by inertia in a plane along the first axis. A supply and sensing circuit is electrically coupled to the excitation coil and to the first sensing coil, and is configured for generating a time-variable flow of electric current that flows in the excitation coil so as to generate a magnetic field that interacts with the magnetic-field concentrator to induce a voltage/current in the sensing coil. The integrated circuit is configured for measuring a value of the voltage/current induced in the first sensing coil so as to detect a quantity associated to the displacement of the suspended mass along the first axis.
- 主权项：
- 1. A system, comprising:
a first device that includes:
a movable mass;a concentrator layer on the movable mass; a second device coupled to the first device, the second device includes:
a substrate;an application specific integrated circuit in the substrate;a coil support layer on the substrate;an excitation coil in the coil support layer;a first sensing coil in the coil support layer, the concentrator layer being between the movable mass and the coil support layer; anda second sensing coil in the coil support layer, the excitation coil being positioned between the first sensing coil and the second sensing coil.
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