DYNAMIC BUFFER CHAMBER

申请公布号：

WO9609420(A1)

申请号：

WO1995US12385

申请日期：

1995.09.21

申请公布日期：

1996.03.28

申请人：

CONNER PERIPHERALS, INC.

发明人：

BRUNO, JOHN

分类号：

C23C14/56;G11B5/851;(IPC1-7):C23C14/56;G11B5/84

主分类号：

C23C14/56

摘要：

A dynamic buffer chamber in an in-line sputtering apparatus for fabricating magnet recording disks for Winchester-type hard disk drives, the dynamic buffer chamber being positioned between first and second processes of the sputtering apparatus to isolate the respective processes from each other with respect to pressure, temperature and gaseous composition.