Mass spectrometer

申请公布号：

US9368335(B1)

申请号：

US201514611682

申请日期：

2015.02.02

申请公布日期：

2016.06.14

申请人：

Thermo Finnigan LLC

发明人：

Quarmby Scott T.;Tehlirian Berg A.

分类号：

H01J49/24;H01J49/04;F04D19/04

主分类号：

H01J49/24

代理人：

Schell David A.

地址：

San Jose CA US

摘要：

A mass spectrometer system can include a vacuum manifold and a high vacuum pump. The vacuum manifold can include a foreline chamber and a high vacuum chamber. The foreline chamber can have a source inlet, a foreline inlet, and a foreline outlet. The high vacuum pump can have a vacuum port coupled to high vacuum chamber, and a foreline port coupled to the foreline inlet.

主权项：

1. A mass spectrometer system, comprising: a vacuum manifold including: a foreline chamber having a source inlet, a foreline inlet, and a foreline outlet; anda high vacuum chamber; and a high vacuum pump having a vacuum port coupled to high vacuum chamber; anda foreline port coupled to the foreline inlet, wherein gases from the high vacuum pump flow through the foreline chamber and out to a foreline pump via the foreline outlet.