Method for manufacturing a porous glass film

申请公布号：

US9517969(B2)

申请号：

US201214358850

申请日期：

2012.10.18

申请公布日期：

2016.12.13

申请人：

Canon Kabushiki Kaisha

发明人：

Koketsu Naoyuki;Zhang Zuyi;Kotani Yoshinori;Takei Akiko;Sugiyama Akira;Takashima Kenji

分类号：

C03C11/00;C03C17/00;G02B5/30

主分类号：

C03C11/00

代理机构：

Canon USA, Inc. I.P. Division

代理人：

Canon USA, Inc. I.P. Division

地址：

Tokyo JP

摘要：

The present invention provides an optical member having a high transmittance, wherein a composition change of a phase-separable base material glass film is suppressed.;A method for manufacturing an optical member provided with a porous glass film on the base member includes the steps of forming a glass powder film containing a glass powder on the base member, forming a phase-separable base material glass film on the base member by heating and fusing the glass powder film in an atmosphere having an oxygen concentration of more than 20%, forming a phase-separated glass film on the base member by heating the base material glass film, and forming a porous glass film on the base member by subjecting the phase-separated glass film to an etching treatment.

主权项：

1. A method for manufacturing an optical member provided with a porous glass film on a base member, comprising the steps of: forming a glass powder film containing a glass powder on the base member; forming a phase-separable base material glass film on the base member by heating and fusing the glass powder film; forming a phase-separated glass film on the base member by heating the base material glass film; and forming a porous glass film on the base member by subjecting the phase-separated glass film to an etching treatment, wherein the glass powder comprises SiO2, B2O3, Na2O and Al2O3, and wherein the step of forming a phase-separable base material glass film on the base member by heating and fusing the glass powder film is performed in an atmosphere having an oxygen concentration of 50% or more.