THIN FILM TRANSISTOR AND ITS MANUFACTURE
- 申请公布号:
- JPH0637111(A)
- 申请号:
- JP19920189609
- 申请日期:
- 1992.07.16
- 申请公布日期:
- 1994.02.10
- 申请人:
- SHARP CORP
- 发明人:
- SHIMADA YOSHIHIRO;KATAYAMA MIKIO;KONDO NAOFUMI;KATAOKA YOSHIHARU;TAKAHAMA MANABU;NISHIOKA YUKIYA
- 分类号:
- H01L29/78;H01L21/336;H01L29/786;(IPC1-7):H01L21/336;H01L29/784
- 主分类号:
- H01L29/78