SIMULATION DEVICE AND METHOD, AND COMPUTER READABLE MEMORY MEDIUM STORING SIMULATION PROGRAM THEREIN
- 申请公布号：
- JPH11204383(A)
- 申请号：
- JP19980006837
- 申请日期：
- 1998.01.16
- 申请公布日期：
- 1999.07.30
- 申请人：
- TOSHIBA CORP
- 发明人：
- ISHIHARA TAKAMITSU;MATSUZAWA KAZUYA
- 分类号：
- G06F9/455;G06F13/00;G06F17/00;G06F17/17;G06F19/00;G06Q50/00;G06Q50/04;H01L21/00;H01L21/336;H01L21/82;H01L21/8247;H01L27/115;H01L29/00;H01L29/78;H01L29/788;H01L29/792
- 主分类号：
- G06F9/455
- 摘要：
- PROBLEM TO BE SOLVED: To obtain effectively stable results while reducing consumption of memory medium, by dividing particle, carrying out allocation weighing transition probability regarding all the states which allow division particle, and carrying out reconstruction adding up each division particle thereafter. SOLUTION: A state mesh division means 51 divides injected particle and possible state after state transition whenever state transition of atom of a substrate is generated on collision of the particle into a finite number of state mesh. A weight decision means 52 decides a weight of dislocation energy of each scattering angle from transition probability to each state constituting state mesh. An allocation means 53 carries out allocation to satisfy law of conservation of energy and law of conservation of momentum weighing dislocation energy of each scattering angle to energy of injected particle. An aggregation means 54 calculates change of energy due to elastic/non-elastic scattering between a substrate and atom regarding each particle and reconstructs one particle from each energy after change.
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